JPS63120199U - - Google Patents
Info
- Publication number
- JPS63120199U JPS63120199U JP994887U JP994887U JPS63120199U JP S63120199 U JPS63120199 U JP S63120199U JP 994887 U JP994887 U JP 994887U JP 994887 U JP994887 U JP 994887U JP S63120199 U JPS63120199 U JP S63120199U
- Authority
- JP
- Japan
- Prior art keywords
- liquid supply
- flow rate
- tank
- processing liquid
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 20
- 239000010409 thin film Substances 0.000 claims description 7
- 238000000034 method Methods 0.000 claims 2
- 238000001514 detection method Methods 0.000 claims 1
- 239000002901 radioactive waste Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Heat Treatment Of Water, Waste Water Or Sewage (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP994887U JPS63120199U (en]) | 1987-01-28 | 1987-01-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP994887U JPS63120199U (en]) | 1987-01-28 | 1987-01-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63120199U true JPS63120199U (en]) | 1988-08-03 |
Family
ID=30795748
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP994887U Pending JPS63120199U (en]) | 1987-01-28 | 1987-01-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63120199U (en]) |
-
1987
- 1987-01-28 JP JP994887U patent/JPS63120199U/ja active Pending